Upscaling of an a-C:H:Si Triplex Process in an Industrial DC PACVD System

Translated title of the contribution: Upscaling of an a-C:H:Si Triplex Process in an Industrial DC PACVD System

Christian Forsich, Daniel Heim, Thomas Müller, Andreas Gebeshuber

Research output: Chapter in Book/Report/Conference proceedings › Conference contribution

Translated title of the contribution	Upscaling of an a-C:H:Si Triplex Process in an Industrial DC PACVD System
Original language	German
Title of host publication	37th International Conference on Metallurgical Coatings and Thin Films
Publication status	Published - 2010
Event	http://www2.avs.org/conferences/icmctf/ - San Diego, United States Duration: 26 Apr 2010 → 30 Apr 2010 http://www2.avs.org/conferences/icmctf/

Conference	http://www2.avs.org/conferences/icmctf/
Country/Territory	United States
City	San Diego
Period	26.04.2010 → 30.04.2010
Internet address	http://www2.avs.org/conferences/icmctf/

Cite this

@inproceedings{5247e3f37be54e6180c1da5bc8265413,

title = "Upscaling of an a-C:H:Si Triplex Process in an Industrial DC PACVD System",

author = "Christian Forsich and Daniel Heim and Thomas M{\"u}ller and Andreas Gebeshuber",

year = "2010",

language = "Deutsch",

booktitle = "37th International Conference on Metallurgical Coatings and Thin Films",

note = "http://www2.avs.org/conferences/icmctf/ ; Conference date: 26-04-2010 Through 30-04-2010",

url = "http://www2.avs.org/conferences/icmctf/ ",

}

TY - GEN

T1 - Upscaling of an a-C:H:Si Triplex Process in an Industrial DC PACVD System

AU - Forsich, Christian

AU - Heim, Daniel

AU - Müller, Thomas

AU - Gebeshuber, Andreas

PY - 2010

Y1 - 2010

M3 - Konferenzbeitrag

BT - 37th International Conference on Metallurgical Coatings and Thin Films

T2 - http://www2.avs.org/conferences/icmctf/

Y2 - 26 April 2010 through 30 April 2010

ER -