Upscaling of an a-C:H:Si Triplex Process in an Industrial DC PACVD System

Christian Forsich, Daniel Heim, Thomas Müller, Andreas Gebeshuber

Research output: Chapter in Book/Report/Conference proceedingsConference contribution

Translated title of the contributionUpscaling of an a-C:H:Si Triplex Process in an Industrial DC PACVD System
Original languageGerman
Title of host publication37th International Conference on Metallurgical Coatings and Thin Films
Publication statusPublished - 2010
Eventhttp://www2.avs.org/conferences/icmctf/ - San Diego, United States
Duration: 26 Apr 201030 Apr 2010
http://www2.avs.org/conferences/icmctf/

Conference

Conferencehttp://www2.avs.org/conferences/icmctf/
CountryUnited States
CitySan Diego
Period26.04.201030.04.2010
Internet address

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