TiAlN and TiAlCN deposition in an industrial PaCVD-plant

Keyphrases

• TiAlN 100%
• TiAlCN 100%
• Aluminum Chloride 50%
• Ar-H2 50%
• Tool Life 50%
• Wear Test 50%
• DC Pulse 50%
• Titanium Tetrachloride 50%
• Alq3 50%
• Frequency up 50%
• Growth Rate 50%
• Hard Steel 50%
• Indexable Inserts 50%
• Steel Substrate 50%
• Deposited Film 50%
• Hardmetal 50%
• Metal Substrate 50%
• Reactor Size 50%
• TiN Coated Tool 50%
• Pulsed Power Supply 50%

Material Science

• Film 100%
• Steel Substrate 50%