The role of oxygen in optical activation of Er implanted in Si

  • H. Przybylinska*
  • , G. Hendorfer
  • , M. Bruckner
  • , W. Jantsch
  • , L. Palmetshofer
    • *Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

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Keyphrases

Chemistry

Material Science

Engineering

Chemical Engineering