Study of a pulsed DC glow-discharge used for plasma-CVD with an ultrafast videosystem and a langmuir-probe

T. A. Beer, D. Heim, J. Laimer, H. Störi

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)
Original languageEnglish
Pages (from-to)299-302
Number of pages4
JournalMaterials Science Forum
Volume287-288
DOIs
Publication statusPublished - 1998
Externally publishedYes

Keywords

  • Langmuir-Probe
  • Plasma Dynamic
  • Plasma-CVD
  • Pulsed DC Discharge
  • Videosystem

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