Spectroscopic ellipsometry as a tool for on-line monitoring and control of surface treatment processes

C. Eitzinger, J. Fikar, C. Forsich, J. Humliček, A. Krüger, R. Kullmer, J. Laimer, E. Lingenhöle, K. Lingenhöle, M. Mühlberger, T. Müller, H. Störi, U. Wielsch

Research output: Chapter in Book/Report/Conference proceedingsConference contributionpeer-review

6 Citations (Scopus)

Abstract

Modern material technology relies increasingly on processes for surface modification and coating. Generally, we are lacking a possibility to monitor the progress of such processes. Thus the outcome can only be analyzed after the end of the whole process cycle. We are proposing to use spectroscopic ellipsometry (SE) as an on-line monitoring tool. SE, as an optical method, is not affected by high temperatures, process gases, plasmas, etc. It can be used as a monitoring tool or a sensor for closed loop control of processes. The main difficulty is the on-line interpretation of SE data. Depending on the nature of the process monitored or controlled, different models are used for the interpretation. These models predict the SE response depending on different parameters describing the surface under investigation. A fitting process is used to solve the inverse problem, i.e. extracting material data from the SE spectra. We expect increased process stability and shorter development time as a practical benefit from the use of SE.

Original languageEnglish
Title of host publicationRecent Developments in Advanced Materials and Processes - Selected Papers presented at the 7th Conference of the Yugoslav Materials Research Society
PublisherTrans Tech Publications Ltd
Pages423-430
Number of pages8
ISBN (Print)9780878494057
DOIs
Publication statusPublished - 2006
Externally publishedYes
Event7th Conference of the Yugoslav Materials Research Society - Recent Developments in Advanced Materials and Processes, YUCOMAT VII - Herceg Novi, Serbia
Duration: 12 Sept 200516 Sept 2005

Publication series

NameMaterials Science Forum
Volume518
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Conference

Conference7th Conference of the Yugoslav Materials Research Society - Recent Developments in Advanced Materials and Processes, YUCOMAT VII
Country/TerritorySerbia
CityHerceg Novi,
Period12.09.200516.09.2005

Keywords

  • Closed loop control
  • Nitriding
  • On-line monitor
  • Spectroscopic ellipsometry
  • Surface treatment

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