The coating deposition inside tubes becomes increasingly important for fluidic applications, in which inner surfaces are chemically and mechanically strained by the flowing liquid and by scratching of particles. The developed process for tube coating, presented in this work, is based on the discharge in the precursor gas atmosphere between two mesh electrodes at the ends of the tube. The gas mixture is introduced on one end and pumped through the electrode on the other end. Igniting plasma inside the tube, the tube walls are the barrier to the atmosphere. Especially pulsed DC discharges for plasma polymerization in this alignment lead to good coating results, which is shown in this work focusing on deposition in pure and mixed hexamethyldisiloxane, ethyne, and oxygen atmospheres. Chemical binding, wetting, and ageing are strongly influenced by the choice of the gas mixtures. Sufficient oxygen partial pressure in the deposition atmosphere leads to hydrophilic behavior of the SiO2-like polymerlike carbon coatings, all other applied atmospheres to generally hydrophobic behavior of pure and Si-doped plasma polymers, respectively.
- Coating of tubes
- Plasma polymerization