PACVD zur Abscheidung Si-hältiger Kohlenstoffschichten

Translated title of the contribution: PACVD for deposition of Si-containing carbon coatings

Research output: Chapter in Book/Report/Conference proceedings › Conference contribution

Translated title of the contribution	PACVD for deposition of Si-containing carbon coatings
Original language	German
Title of host publication	Proceedings FH Science Day 2008
Publisher	Shaker Verlag
Publication status	Published - 2008
Event	FH Science Day 2008 - Linz, Austria Duration: 6 Nov 2008 → 6 Nov 2008 http://www.fh-ooe.at http://www.fh-linz.at

Conference	FH Science Day 2008
Country/Territory	Austria
City	Linz
Period	06.11.2008 → 06.11.2008
Internet address	http://www.fh-ooe.at http://www.fh-linz.at

Cite this

@inproceedings{cc5a8cf13b2f4156aebac2125662b707,

title = "PACVD zur Abscheidung Si-h{\"a}ltiger Kohlenstoffschichten",

author = "Christian Forsich and Daniel Heim and Daniel M{\"u}ller",

year = "2008",

language = "Deutsch",

booktitle = "Proceedings FH Science Day 2008",

publisher = "Shaker Verlag",

note = "FH Science Day 2008 ; Conference date: 06-11-2008 Through 06-11-2008",

url = "http://www.fh-ooe.at, http://www.fh-linz.at",

}