PACVD for deposition of Si-containing carbon coatings

Research output: Chapter in Book/Report/Conference proceedingsConference contribution

Translated title of the contributionPACVD for deposition of Si-containing carbon coatings
Original languageGerman
Title of host publicationProceedings FH Science Day 2008
PublisherShaker Verlag
Publication statusPublished - 2008
EventFH Science Day 2008 - Linz, Austria
Duration: 6 Nov 20086 Nov 2008
http://www.fh-ooe.at
http://www.fh-linz.at

Conference

ConferenceFH Science Day 2008
CountryAustria
CityLinz
Period06.11.200806.11.2008
Internet address

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