NanoXCT: development of a laboratory nano-CT system

Frank Nachtrab, Markus Firsching, Norman Uhlmann, C. Speier, Per Takman, Tomi Tuohimaa, Christoph Heinzl, Johann Kastner, DH Larsson, Anders Holmberg, Giovanni Berti, Christoph Sauerwein, Michael Krumm

Research output: Chapter in Book/Report/Conference proceedingsConference contributionpeer-review

7 Citations (Scopus)

Abstract

The NanoXCT project aims at developing a laboratory nano-CT system for non-destructive testing applications in the micro- and nano-technology sector. The system concept omits the use of X-ray optics, to be able to provide up to 1 mm FOV (at 285 nm voxel size) and down to 50 nm voxel size (at 0.175 mm FOV) while preserving the flexibility of state-of-the-art micro-CT systems. Within the project a suitable X-ray source, detector and manipulation system are being developed. To cover the demand for elemental analysis, the project will additionally include X-ray spectroscopic techniques. These will be reported elsewhere while this paper is focused on the imaging part of the project. We introduce the system concept including design goals and constraints, and the individual components. We present the current state of the prototype development including first results.

Original languageEnglish
Title of host publicationDevelopments in X-Ray Tomography IX
EditorsStuart R. Stock
PublisherSPIE Press
ISBN (Electronic)9781628412390
ISBN (Print)9781628412390
DOIs
Publication statusPublished - 2014
EventSPIE Optical Engineering + Applications - San Diego, California, United States, United States
Duration: 17 Aug 201421 Aug 2014
http://spie.org/x12769.xml

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9212
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceSPIE Optical Engineering + Applications
Country/TerritoryUnited States
CitySan Diego, California, United States
Period17.08.201421.08.2014
Internet address

Keywords

  • Computed tomography
  • Nano-CT
  • Nano-focus
  • NanoXCT
  • Photon-counting X-ray detector
  • Timepix detector
  • Transmission tube

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