C60 fullerite films on Si substrates have been bombarded with H, He, C and Ar ions with energies between 60 and 600 keV and doses ranging from 1 × 1012 to 5 × 1016 cm-2. Raman scattering showed structural changes of the fullerite depending on the ion species, energy and dose. At low doses a new line at 1463 cm-1 in the Raman spectra indicates polymerization of C60. At higher doses a broad and asymmetric line between 1000 and 1700 cm-1 appears which is characteristic for amorphous carbon. The amorphization process is correlated with the nuclear energy deposition while electronic energy loss leads to polymerization of C60.