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Investigations on possibilities of inline inspection of high aspect ratio microstructures
Rainer Engelke, Gisela Ahrens, Norbert Arndt-Staufenbiehl, Stefan Kopetz, Karin Wiesauer, Bernd Löchel, Henning Schröder, Johann Kastner, Andreas Neyer, David Stifter, Gabi Grützner
Research output: Contribution to journal › Article › peer-review
8
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(Scopus)