Duplex a-C:H:Si coatings of inner surfaces by means of DC-PACVD

Christian Forsich, Daniel Heim, Thomas Müller, Andreas Gebeshuber

Research output: Chapter in Book/Report/Conference proceedings › Conference contribution

Original language	English
Title of host publication	54th Annual Technical Conference ProceedingsConference
Publisher	Society of Vacuum Coaters
ISBN (Print)	1878068318, 9781878068316
Publication status	Published - 2011
Event	54th Annual Society of Vacuum Coaters Technical Conference - Chicago, United States Duration: 16 Apr 2011 → 21 Apr 2011 http://www.svc.org/ConferencesExhibits/2011-TechConExhibitEducation-Program.cfm

Conference	54th Annual Society of Vacuum Coaters Technical Conference
Country/Territory	United States
City	Chicago
Period	16.04.2011 → 21.04.2011
Internet address	http://www.svc.org/ConferencesExhibits/2011-TechConExhibitEducation-Program.cfm

Cite this

@inproceedings{ff595bb3fd0e46b49cdcd6b125d74f42,

title = "Duplex a-C:H:Si coatings of inner surfaces by means of DC-PACVD",

author = "Christian Forsich and Daniel Heim and Thomas M{\"u}ller and Andreas Gebeshuber",

year = "2011",

language = "English",

isbn = "1878068318, 9781878068316",

booktitle = "54th Annual Technical Conference ProceedingsConference",

publisher = "Society of Vacuum Coaters",

note = "54th Annual Society of Vacuum Coaters Technical Conference ; Conference date: 16-04-2011 Through 21-04-2011",

url = "http://www.svc.org/ConferencesExhibits/2011-TechConExhibitEducation-Program.cfm",

}

TY - GEN

T1 - Duplex a-C:H:Si coatings of inner surfaces by means of DC-PACVD

AU - Forsich, Christian

AU - Heim, Daniel

AU - Müller, Thomas

AU - Gebeshuber, Andreas

PY - 2011

Y1 - 2011

M3 - Conference contribution

SN - 1878068318, 9781878068316

BT - 54th Annual Technical Conference ProceedingsConference

PB - Society of Vacuum Coaters

T2 - 54th Annual Society of Vacuum Coaters Technical Conference

Y2 - 16 April 2011 through 21 April 2011

ER -