Duplex a-C:H:Si coatings of inner surfaces by means of DC-PACVD

Christian Forsich, Daniel Heim, Thomas Müller, Andreas Gebeshuber

Research output: Chapter in Book/Report/Conference proceedingsConference contribution

Original languageEnglish
Title of host publication54th Annual Technical Conference ProceedingsConference
PublisherSociety of Vacuum Coaters
ISBN (Print)1878068318, 9781878068316
Publication statusPublished - 2011
Event54th Annual Society of Vacuum Coaters Technical Conference - Chicago, United States
Duration: 16 Apr 201121 Apr 2011
http://www.svc.org/ConferencesExhibits/2011-TechConExhibitEducation-Program.cfm

Conference

Conference54th Annual Society of Vacuum Coaters Technical Conference
CountryUnited States
CityChicago
Period16.04.201121.04.2011
Internet address

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