Deposition of thick a-C:H:Si coatings for tribological applications

Daniel Heim, Christian Forsich, Thomas Müller

Research output: Chapter in Book/Report/Conference proceedingsConference contribution

Translated title of the contributionDeposition of thick a-C:H:Si coatings for tribological applications
Original languageGerman
Title of host publication55th Annual Technical Conference Proceedings
PublisherSociety of Vacuum Coaters
ISBN (Print)1878068326, 9781878068323
Publication statusPublished - 2012
Event55th Annual Society of Vacuum Coaters Technical Conference - Santa Clara, United States
Duration: 28 Apr 20123 May 2012
http://www.svc.org/ConferencesExhibits/2012-TechCon-Conference/2012-TechConExhibitEducation-Program.cfm

Conference

Conference55th Annual Society of Vacuum Coaters Technical Conference
CountryUnited States
CitySanta Clara
Period28.04.201203.05.2012
Internet address

Cite this