Deposition of SiOCN and Si-C:H Films in an Industrial Pulsed dc PACVD System

Research output: Contribution to conference › Paper

Original language	English
Number of pages	1
Publication status	Published - 2007
Event	34th International Conference on Metallurgical Coatings and Thin Films 2007 - San Diego, United States Duration: 23 Apr 2007 → 27 Apr 2007

Conference	34th International Conference on Metallurgical Coatings and Thin Films 2007
Country/Territory	United States
City	San Diego
Period	23.04.2007 → 27.04.2007

Cite this

@conference{48a1bb1e457b43eb801793640944cd8c,

title = "Deposition of SiOCN and Si-C:H Films in an Industrial Pulsed dc PACVD System",

author = "Christian Forsich and Daniel Heim",

year = "2007",

language = "English",

note = "34th International Conference on Metallurgical Coatings and Thin Films 2007 ; Conference date: 23-04-2007 Through 27-04-2007",

}