Deposition of SiOCN and Si-C:H Films in an Industrial Pulsed dc PACVD System

Research output: Contribution to conferencePaper

Original languageEnglish
Number of pages1
Publication statusPublished - 2007
Event34th International Conference on Metallurgical Coatings and Thin Films 2007 - San Diego, United States
Duration: 23 Apr 200727 Apr 2007

Conference

Conference34th International Conference on Metallurgical Coatings and Thin Films 2007
CountryUnited States
CitySan Diego
Period23.04.200727.04.2007

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