Deposition of N, F and O-doped Amorphous Carbon-Silicon Coatings in an Industrial DC-PACVD-System

Daniel Heim, Christian Forsich, Thomas Müller, Andreas Gebeshuber

Research output: Chapter in Book/Report/Conference proceedingsConference contribution

Translated title of the contributionDeposition of N, F and O-doped Amorphous Carbon-Silicon Coatings in an Industrial DC-PACVD-System
Original languageGerman
Title of host publication14th International Conference on Plasma Surface Engineering
Publication statusPublished - 2014
Event12th International Conference on Plasma Surface Engineering - Garmisch-Partenkirchen, Germany
Duration: 15 Sep 201419 Sep 2014

Conference

Conference12th International Conference on Plasma Surface Engineering
Country/TerritoryGermany
CityGarmisch-Partenkirchen
Period15.09.201419.09.2014

Cite this