@inproceedings{e93f0922f04443fbaac7cf7cdfe508d8,
title = "Adhesion and Homogeneity of a-C:H:Si Films Deposited in a Modified Plasma Nitriding System for Industrial Application",
author = "Christian Forsich and Daniel Heim and Thomas M{\"u}ller",
year = "2009",
language = "English",
booktitle = "36th International Conference on Metallurgical Coatings and Thin Films 2009",
note = "36th International Conference on Metallurgical Coatings and Thin Films ; Conference date: 27-04-2009 Through 01-05-2009",
}