Adhesion and Homogeneity of a-C:H:Si Films Deposited in a Modified Plasma Nitriding System for Industrial Application

Research output: Chapter in Book/Report/Conference proceedingsConference contribution

Original languageEnglish
Title of host publication36th International Conference on Metallurgical Coatings and Thin Films 2009
Publication statusPublished - 2009
Event36th International Conference on Metallurgical Coatings and Thin Films - San Diego, United States
Duration: 27 Apr 20091 May 2009

Conference

Conference36th International Conference on Metallurgical Coatings and Thin Films
CountryUnited States
CitySan Diego
Period27.04.200901.05.2009

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