ACOLISSA: A powerful set-up for ion beam analysis of surfaces and multilayer structures

M. Draxler; S. N. Markin; S. N. Ermolov; K. Schmid; C. Hesch; A. Poschacher; R. Gruber; M. Bergsmann; P. Bauer

doi:10.1016/j.vacuum.2003.12.041

ACOLISSA: A powerful set-up for ion beam analysis of surfaces and multilayer structures

M. Draxler, S. N. Markin, S. N. Ermolov, K. Schmid, C. Hesch, A. Poschacher, R. Gruber, M. Bergsmann, P. Bauer^*

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

54 Citations (Scopus)

Abstract

The experimental set-up for analysis of the charge of light ions scattered from surface atoms (ACOLISSA) is described in the following paper. ACOLISSA is used for determination of flight times of low-energy ions. It permits time-of-flight low energy ion scattering spectra of all scattered projectiles (TOF-LEIS-AP) as well as charge separated (TOF-LEIS-CS) spectra to be recorded. The evaluation of TOF-LEIS-AP spectra allows subsurface layers of the target to be studied. The analysis of TOF-LEIS-CS spectra together with ions only spectra (TOF-LEIS-IO) is used for investigation of the neutralization behaviour of projectiles at the outermost atomic layer. The performance of the set-up is described and, as an example, spectra are shown for a polycrystalline Cu target and a 7 Å Cu layer deposited on top of an alumina substrate.

Original language	English
Pages (from-to)	39-45
Number of pages	7
Journal	Vacuum
Volume	73
Issue number	1
DOIs	https://doi.org/10.1016/j.vacuum.2003.12.041
Publication status	Published - 8 Mar 2004
Externally published	Yes
Event	16th Ion-Surface Interactions Conference - Zvenigorod, Russian Federation Duration: 25 Aug 2003 → 29 Aug 2003

Keywords

Charge separated analysis
Ion beam analysis
Ion scattering
Thin film analysis
Time-of-flight analysis

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10.1016/j.vacuum.2003.12.041

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title = "ACOLISSA: A powerful set-up for ion beam analysis of surfaces and multilayer structures",

abstract = "The experimental set-up for analysis of the charge of light ions scattered from surface atoms (ACOLISSA) is described in the following paper. ACOLISSA is used for determination of flight times of low-energy ions. It permits time-of-flight low energy ion scattering spectra of all scattered projectiles (TOF-LEIS-AP) as well as charge separated (TOF-LEIS-CS) spectra to be recorded. The evaluation of TOF-LEIS-AP spectra allows subsurface layers of the target to be studied. The analysis of TOF-LEIS-CS spectra together with ions only spectra (TOF-LEIS-IO) is used for investigation of the neutralization behaviour of projectiles at the outermost atomic layer. The performance of the set-up is described and, as an example, spectra are shown for a polycrystalline Cu target and a 7 {\AA} Cu layer deposited on top of an alumina substrate.",

keywords = "Charge separated analysis, Ion beam analysis, Ion scattering, Thin film analysis, Time-of-flight analysis",

author = "M. Draxler and Markin, {S. N.} and Ermolov, {S. N.} and K. Schmid and C. Hesch and A. Poschacher and R. Gruber and M. Bergsmann and P. Bauer",

note = "Funding Information: This work was supported partly by the Austrian Science Fund (FWF) under Contract number P12471-NAW and P16173-N08. We would like to express our gratitude to Peter Zeppenfeld for his continuous interest in this work. ; 16th Ion-Surface Interactions Conference ; Conference date: 25-08-2003 Through 29-08-2003",

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day = "8",

doi = "10.1016/j.vacuum.2003.12.041",

language = "English",

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T2 - 16th Ion-Surface Interactions Conference

AU - Draxler, M.

AU - Markin, S. N.

AU - Ermolov, S. N.

AU - Schmid, K.

AU - Hesch, C.

AU - Poschacher, A.

AU - Gruber, R.

AU - Bergsmann, M.

AU - Bauer, P.

N1 - Funding Information: This work was supported partly by the Austrian Science Fund (FWF) under Contract number P12471-NAW and P16173-N08. We would like to express our gratitude to Peter Zeppenfeld for his continuous interest in this work.

PY - 2004/3/8

Y1 - 2004/3/8

N2 - The experimental set-up for analysis of the charge of light ions scattered from surface atoms (ACOLISSA) is described in the following paper. ACOLISSA is used for determination of flight times of low-energy ions. It permits time-of-flight low energy ion scattering spectra of all scattered projectiles (TOF-LEIS-AP) as well as charge separated (TOF-LEIS-CS) spectra to be recorded. The evaluation of TOF-LEIS-AP spectra allows subsurface layers of the target to be studied. The analysis of TOF-LEIS-CS spectra together with ions only spectra (TOF-LEIS-IO) is used for investigation of the neutralization behaviour of projectiles at the outermost atomic layer. The performance of the set-up is described and, as an example, spectra are shown for a polycrystalline Cu target and a 7 Å Cu layer deposited on top of an alumina substrate.

AB - The experimental set-up for analysis of the charge of light ions scattered from surface atoms (ACOLISSA) is described in the following paper. ACOLISSA is used for determination of flight times of low-energy ions. It permits time-of-flight low energy ion scattering spectra of all scattered projectiles (TOF-LEIS-AP) as well as charge separated (TOF-LEIS-CS) spectra to be recorded. The evaluation of TOF-LEIS-AP spectra allows subsurface layers of the target to be studied. The analysis of TOF-LEIS-CS spectra together with ions only spectra (TOF-LEIS-IO) is used for investigation of the neutralization behaviour of projectiles at the outermost atomic layer. The performance of the set-up is described and, as an example, spectra are shown for a polycrystalline Cu target and a 7 Å Cu layer deposited on top of an alumina substrate.

KW - Charge separated analysis

KW - Ion beam analysis

KW - Ion scattering

KW - Thin film analysis

KW - Time-of-flight analysis

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DO - 10.1016/j.vacuum.2003.12.041

M3 - Conference article

AN - SCOPUS:1142292374

SN - 0042-207X

VL - 73

SP - 39

EP - 45

JO - Vacuum

JF - Vacuum

IS - 1

Y2 - 25 August 2003 through 29 August 2003

ER -

ACOLISSA: A powerful set-up for ion beam analysis of surfaces and multilayer structures

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Keywords

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