ACOLISSA: A powerful set-up for ion beam analysis of surfaces and multilayer structures

M. Draxler, S. N. Markin, S. N. Ermolov, K. Schmid, C. Hesch, A. Poschacher, R. Gruber, M. Bergsmann, P. Bauer

Research output: Contribution to journalConference articlepeer-review

51 Citations (Scopus)

Abstract

The experimental set-up for analysis of the charge of light ions scattered from surface atoms (ACOLISSA) is described in the following paper. ACOLISSA is used for determination of flight times of low-energy ions. It permits time-of-flight low energy ion scattering spectra of all scattered projectiles (TOF-LEIS-AP) as well as charge separated (TOF-LEIS-CS) spectra to be recorded. The evaluation of TOF-LEIS-AP spectra allows subsurface layers of the target to be studied. The analysis of TOF-LEIS-CS spectra together with ions only spectra (TOF-LEIS-IO) is used for investigation of the neutralization behaviour of projectiles at the outermost atomic layer. The performance of the set-up is described and, as an example, spectra are shown for a polycrystalline Cu target and a 7 Å Cu layer deposited on top of an alumina substrate.

Original languageEnglish
Pages (from-to)39-45
Number of pages7
JournalVacuum
Volume73
Issue number1
DOIs
Publication statusPublished - 8 Mar 2004
Externally publishedYes
Event16th Ion-Surface Interactions Conference - Zvenigorod, Russian Federation
Duration: 25 Aug 200329 Aug 2003

Keywords

  • Charge separated analysis
  • Ion beam analysis
  • Ion scattering
  • Thin film analysis
  • Time-of-flight analysis

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