Abstract
The experimental set-up for analysis of the charge of light ions scattered from surface atoms (ACOLISSA) is described in the following paper. ACOLISSA is used for determination of flight times of low-energy ions. It permits time-of-flight low energy ion scattering spectra of all scattered projectiles (TOF-LEIS-AP) as well as charge separated (TOF-LEIS-CS) spectra to be recorded. The evaluation of TOF-LEIS-AP spectra allows subsurface layers of the target to be studied. The analysis of TOF-LEIS-CS spectra together with ions only spectra (TOF-LEIS-IO) is used for investigation of the neutralization behaviour of projectiles at the outermost atomic layer. The performance of the set-up is described and, as an example, spectra are shown for a polycrystalline Cu target and a 7 Å Cu layer deposited on top of an alumina substrate.
Original language | English |
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Pages (from-to) | 39-45 |
Number of pages | 7 |
Journal | Vacuum |
Volume | 73 |
Issue number | 1 |
DOIs | |
Publication status | Published - 8 Mar 2004 |
Externally published | Yes |
Event | 16th Ion-Surface Interactions Conference - Zvenigorod, Russian Federation Duration: 25 Aug 2003 → 29 Aug 2003 |
Keywords
- Charge separated analysis
- Ion beam analysis
- Ion scattering
- Thin film analysis
- Time-of-flight analysis