Accurate and Efficient Modeling of SAW Structures

By way of two examples it is demonstrated that basic field theory concepts may be successfully applied to model anisotropic microacoustic phenomena which occur in the design of surface acoustic wave (SAW) devices. A new 3D finite element method (FEM) scheme incorporating multigrid (MG) algorithms is presented which allows for the first time a complete and accurate simulation of the propagation of surface acoustic waves in 3D. On the other hand, the feasibility of a new scalar 2D wave theory method called profile propagation method (PPM) is demonstrated and experimentally verified which enables a very efficient simulation of SAW phenomena. Both methods compromise accuracy for efficiency on a specific level of abstraction. Therefore, both techniques are indispensable for the design of complete SAW devices which usually is done employing network-theory methods.