Abscheidung von Si-hältigen Kohlenstoffschichten mittels plasmaunterstützter chemsicher Gasphasenabscheidung

Keyphrases

• Nitrides 100%
• Friction Coefficient 100%
• Si-doped 100%
• Plasma-enhanced Chemical Vapor Deposition (PECVD) 100%
• Doped Carbon 100%
• Carbon Layer 100%
• Chemical Composition 66%
• Amorphous Si 66%
• Si Coating 66%
• Steel Surface 66%
• Steel Substrate 66%
• Surface Roughness 66%
• Si Layer 66%
• Acetylene 66%
• Plasma Nitriding 33%
• Corrosion-resistant Steel 33%
• Compositional Properties 33%
• Corrosion Resistance 33%
• Mechanical Properties 33%
• Microstructure 33%
• Reactor 33%
• Low Friction Coefficient 33%
• Plasma-assisted Chemical Vapor Deposition (PACVD) 33%
• Humidity 33%
• High Hardness 33%
• Carbon Coating 33%
• Diamond-like 33%
• Tion 33%
• Si Content 33%
• Substrate Temperature 33%
• Pulse Time 33%
• Argon 33%
• Coating Properties 33%
• Adhesive Strength 33%
• Salt Spray Test 33%
• Gas Composition 33%
• Power Density 33%
• Surface Tension 33%
• Methane 33%
• Amorphous Structure 33%
• Strength Measurement 33%
• Deposition Parameters 33%
• Pressure Pulse 33%
• Wear Traces 33%
• N Content 33%
• Density-dependent Processes 33%
• Process Pressure 33%

Engineering

• Coefficient of Friction 100%
• Chemical Vapor Deposition 100%
• Carbon Layer 100%
• Vapor Deposition 100%
• Corrosion Resistance 50%
• Steel Surface 50%
• Methane 50%
• Plasma Nitriding 25%
• Microstructure 25%
• Critical Load 25%
• Salt Spray 25%
• Pretreatment 25%
• Diamond-Like Carbon 25%
• Power Density 25%
• Adhesive Strength 25%
• Intermediate Layer 25%
• Gas Composition 25%
• Process Pressure 25%
• Coating Property 25%
• Layer Coating 25%
• Substrate Temperature 25%
• Tension Surface 25%
• Deposition Parameter 25%

Material Science

• Coefficient of Friction 100%
• Plasma-Enhanced Chemical Vapor Deposition 100%
• Corrosion Resistance 50%
• Amorphous Material 50%
• Surface Roughness 50%
• Nitriding 25%
• Density 25%
• Diamond-Like Carbon Coating 25%
• Antibody 25%
• Surface Tension 25%