A new setup for elastic recoil analysis using ion induced electron emission for particle identification

E. Steinbauer, O. Benka, M. Steinbatz

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12 Citations (Scopus)


We describe a new setup for elastic recoil detection analysis (ERDA) using our recently developed particle identification method. Before the ions and elastic recoil atoms from the target reach a silicon surface barrier detector for energy-analysis, they penetrate a set of thin foils (e.g. carbon). The ion induced electron emission yield from the foils depends on the nuclear charge of the penetrating ion and it is roughly proportional to the energy loss in the foil. The emitted electrons are accelerated towards a microchannel plate (MCP), which gives a signal amplitude proportional to the number of emitted electrons. This signal is measured in coincidence with the energy signal from the surface barrier detector using our dual-parameter multichannel analyzer system M2D. Since the energy resolution is not measurably deteriorated by the particle identification our setup offers optimum depth resolution for light elements. Due to the compact design large solid angles for high sensitivity can be achieved. A new measuring chamber has been built which offers considerable improvements. The ERDA scattering angle (30° or 45°) and the target orientation can be selected for optimum depth resolution or sensitivity. Element separation for light elements has been enhanced by several improvements: A new geometry of the foil setup improves the collection efficiency for ion induced electrons onto the MCP, coating of the carbon foils with insulators enhances the electron emission yield. Finally, a new data evaluation procedure has been developed in which the pulse height spectrum of the MCP is considered to be a linear combination of individual spectra from the incident ion and of the recoil atoms. The normalized shapes of these spectra are taken from calibration measurements, the intensities are then calculated using a linear fitting algorithm and finally give the depth profiles of the elements in the target. For hydrogen in near surface layers even isotopic separation is possible. Examples for 1H and 2H in a Be matrix will be given.

Original languageEnglish
Pages (from-to)695-700
Number of pages6
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Publication statusPublished - Mar 1998
Externally publishedYes


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