120 nm resolution and 55nm line width achieved in visible light STED-lithography

Jaroslaw Jacak, Richard Wollhofen, Thomas Klar

Research output: Chapter in Book/Report/Conference proceedingsConference contributionpeer-review

Abstract

STED (stimulated emission depletion) nanoscopy[1, 2] has proven to provide even sub-10 nm resolution[3] in far field fluorescence microscopy and has found ample applications in biology or materials science. Similar to the development two-photon lithography[4] out of the concept of two-photon microscopy, it was proposed already in the very first reports on STED nanoscopy that the confined effective excitation volume can be used to spatially define chemical reactions on the nanometre scale.[1, 2] STED-inspired diffraction-unlimited lithography has been experimentally verified recently.[5-7]

Original languageEnglish
Title of host publicationThe European Conference on Lasers and Electro-Optics, CLEO_Europe 2013
DOIs
Publication statusPublished - 2013
EventThe European Conference on Lasers and Electro-Optics, CLEO_Europe 2013 - Munich, Germany
Duration: 12 May 201316 May 2013

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceThe European Conference on Lasers and Electro-Optics, CLEO_Europe 2013
CountryGermany
CityMunich
Period12.05.201316.05.2013

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