Upscaling of an a-C:H:Si Triplex Process in an Industrial DC PACVD System

  • Forsich, C. (Speaker)
  • Daniel Heim (Speaker)
  • Thomas Müller (Speaker)
  • Andreas Gebeshuber (Speaker)

Activity: Talk or presentation › Oral presentation

Period27 Apr 2009
Event title36th International Conference on Metallurgical Coatings and Thin Films
Event typeConference
LocationSan Diego, United StatesShow on map