ELECTRICAL PROPERTIES OF SILVER SPUTTERED

Benjamin Nagl (Speaker)

Activity: Talk or presentationOral presentation

Description

In this paper the influence of substrates on the resistivity on as grown polycrystalline silver films is discussed. Silver was deposited on polyethylene, polystyrene and glass by RF (13.56 MHz) magnetron sputtering. Polyethylene and polystyrene were selected because of their completely different properties of polarity, crystallinity and surface roughness. Glass samples were used to estimate the deposition rate by using a gravimetrical method. The verification of the film thickness obtained from the deposition rate, was done by SEM analysis. The sheet resistance was measured using the van der Pauw technique. The characteristic increase of the resistivity with decreasing film thickness was modeled with the complete Mayadas - Shatzkes model, which takes into account surface and grain boundary scattering.
Period13 May 2015
Event titleDanube Vltava Sava Polymer Meeting: null
Event typeConference
LocationGmunden, Austria