Activity: Talk or presentation › Oral presentation
Description
In this paper the influence of substrates on the resistivity on as grown
polycrystalline silver films is discussed. Silver was deposited on polyethylene, polystyrene
and glass by RF (13.56 MHz) magnetron sputtering. Polyethylene and polystyrene were
selected because of their completely different properties of polarity, crystallinity and
surface roughness. Glass samples were used to estimate the deposition rate by using a
gravimetrical method. The verification of the film thickness obtained from the deposition
rate, was done by SEM analysis. The sheet resistance was measured using the van der
Pauw technique. The characteristic increase of the resistivity with decreasing film
thickness was modeled with the complete Mayadas - Shatzkes model, which takes into
account surface and grain boundary scattering.