Duplex a-C:H:Si coatings of inner surfaces by means of DC-PACVD

  • Forsich, C. (Speaker)
  • Daniel Heim (Speaker)
  • Thomas Müller (Speaker)
  • Andreas Gebeshuber (Speaker)

Activity: Talk or presentationOral presentation

Period18 Apr 2011
Event titleSVC TechCon
Event typeConference
LocationChicago, United StatesShow on map