Deposition of thick a-C:H:Si-films in an industrial DC-PACVD-system

  • Daniel Heim (Speaker)
  • Forsich, C. (Speaker)
  • Thomas Müller (Speaker)
  • Andreas Gebeshuber (Speaker)

Activity: Talk or presentation › Oral presentation

Period10 Sept 2012
Event title13th International Conference on Plasma Surface Engineering
Event typeConference
LocationGarmisch-Partenkirchen, GermanyShow on map