Adhesion and Homogeneity of a-C:H:Si Films Deposited in a Modified Plasma Nitriding System for Industrial Application

  • Forsich, C. (Speaker)
  • Daniel Heim (Speaker)
  • Andreas Gebeshuber (Speaker)
  • Thomas Müller (Speaker)

Activity: Talk or presentationOral presentation

Period27 Apr 2009
Event title36th International Conference on Metallurgical Coatings and Thin Films
Event typeConference
LocationSan Diego, United StatesShow on map