Adhesion and Homogeneity of a-C:H:Si Films Deposited in a Modified Plasma Nitriding System for Industrial Application

Forsich, C. (Speaker), Daniel Heim (Speaker), Andreas Gebeshuber (Speaker), Thomas Müller (Speaker)

Activity: Talk or presentationOral presentation

Period27 Apr 2009
Event title36th International Conference on Metallurgical Coatings and Thin Films: null
Event typeConference
LocationSan Diego, United States