Study of a pulsed DC glow-discharge used for plasma-CVD with an ultrafast videosystem and a langmuir-probe

T. A. Beer, D. Heim, J. Laimer, H. Störi

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

7 Zitate (Scopus)

Originalsprache	Englisch
Seiten (von - bis)	299-302
Seitenumfang	4
Fachzeitschrift	Materials Science Forum
Jahrgang	287-288
DOIs	https://doi.org/10.4028/www.scientific.net/msf.287-288.299
Publikationsstatus	Veröffentlicht - 1998
Extern publiziert	Ja

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AU - Beer, T. A.

AU - Heim, D.

AU - Laimer, J.

AU - Störi, H.

PY - 1998

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