Ion energy distributions on surfaces exposed to plasmas: An experimental and theoretical investigation

Keyphrases

• Argon 25%
• Collision Processes 75%
• Deposition Process 25%
• Diagnostic Tool 25%
• Discharge Parameters 25%
• Distribution Intensity 25%
• Distributions on Surfaces 100%
• Energy Distribution 100%
• Floating Potential 25%
• Hollow Cathode Discharge 25%
• Ion Current Density 25%
• Ion Energy Distribution 100%
• Ion Flux 50%
• Ion Intensity 25%
• Ion Species 75%
• Iterative Methods 25%
• Numerical Model 25%
• Orifice 25%
• Particle Extraction 25%
• Plasma Diagnostics 25%
• Plasma Sheath 50%
• Plasma-assisted Deposition 25%
• Potential Distribution 25%
• Pressure Range 25%
• Self-consistent Solution 25%
• Sheath Voltage 50%
• Silan 25%
• Space Region 25%

Physics

• Orifice 16%