@inproceedings{b2e577cfdd6d40b8952ad8f736164c51,
title = "Influence and effects of gas flow on the deposition of SiOCN films in an industrial scale DC glow discharge plasma system",
author = "Thomas M{\"u}ller and Andreas Gebeshuber and Daniel Heim and Christian Forsich",
year = "2008",
language = "English",
booktitle = "Asian-European International Conference on Plasma Surface Engineering 2008",
note = "3. Konferenz Mobilit{\"a}t und Mobile Informationssysteme (MMS 2008) ; Conference date: 26-02-2008 Through 28-02-2008",
}