Effect of deposition temperature and hydrogen as a process gas on mechanical properties and specific electrical resistivity of thick a-C:H obtained by means of PACVD

Simon Danninger, Francisco a. Delfin, Manuel Schachinger, Christian Forsich, Daniel Heim, Bernd Rübig, Christian Dipolt, Thomas Müller

Publikation: Beitrag in FachzeitschriftArtikelBegutachtung

2 Zitate (Scopus)

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Keyphrases

Engineering

Material Science