Deposition of SiOCN and Si-C:H Films in an Industrial Pulsed dc PACVD System

Publikation: Konferenzbeitrag › Papier

Originalsprache	Englisch
Seitenumfang	1
Publikationsstatus	Veröffentlicht - 2007
Veranstaltung	34th International Conference on Metallurgical Coatings and Thin Films 2007 - San Diego, USA/Vereinigte Staaten Dauer: 23 Apr. 2007 → 27 Apr. 2007

Konferenz	34th International Conference on Metallurgical Coatings and Thin Films 2007
Land/Gebiet	USA/Vereinigte Staaten
Ort	San Diego
Zeitraum	23.04.2007 → 27.04.2007

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@conference{48a1bb1e457b43eb801793640944cd8c,

title = "Deposition of SiOCN and Si-C:H Films in an Industrial Pulsed dc PACVD System",

author = "Christian Forsich and Daniel Heim",

year = "2007",

language = "English",

note = "34th International Conference on Metallurgical Coatings and Thin Films 2007 ; Conference date: 23-04-2007 Through 27-04-2007",

}