Deposition of N, F and O-doped Amorphous Carbon-Silicon Coatings in an Industrial DC-PACVD-System

Daniel Heim, Christian Forsich, Thomas Müller, Andreas Gebeshuber

Publikation: Beitrag in Buch/Bericht/Tagungsband › Konferenzbeitrag

Titel in Übersetzung	Deposition of N, F and O-doped Amorphous Carbon-Silicon Coatings in an Industrial DC-PACVD-System
Originalsprache	Deutsch
Titel	14th International Conference on Plasma Surface Engineering
Publikationsstatus	Veröffentlicht - 2014
Veranstaltung	12th International Conference on Plasma Surface Engineering - Garmisch-Partenkirchen, Deutschland Dauer: 15 Sep. 2014 → 19 Sep. 2014

Konferenz	12th International Conference on Plasma Surface Engineering
Land/Gebiet	Deutschland
Ort	Garmisch-Partenkirchen
Zeitraum	15.09.2014 → 19.09.2014

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@inproceedings{e7ce972061ef42f8a2f17b4b7d54e065,

title = "Deposition of N, F and O-doped Amorphous Carbon-Silicon Coatings in an Industrial DC-PACVD-System",

author = "Daniel Heim and Christian Forsich and Thomas M{\"u}ller and Andreas Gebeshuber",

year = "2014",

language = "Deutsch",

booktitle = "14th International Conference on Plasma Surface Engineering",

note = "12th International Conference on Plasma Surface Engineering ; Conference date: 15-09-2014 Through 19-09-2014",

}

TY - GEN

T1 - Deposition of N, F and O-doped Amorphous Carbon-Silicon Coatings in an Industrial DC-PACVD-System

AU - Heim, Daniel

AU - Forsich, Christian

AU - Müller, Thomas

AU - Gebeshuber, Andreas

PY - 2014

Y1 - 2014

M3 - Konferenzbeitrag

BT - 14th International Conference on Plasma Surface Engineering

T2 - 12th International Conference on Plasma Surface Engineering

Y2 - 15 September 2014 through 19 September 2014

ER -